Pfeiffer C590 PVD Evap.Sputtering SystemPfeiffer
C590
Machine data
- Machine type:
- Pfeiffer C590 PVD Evap.Sputtering System
- Manufacturer:
- Pfeiffer
- Model:
- C590
- Condition:
- good (used)
Price & Location
- Location:
- Albert Plesmanstraat 3, 6021 PR Budel, Nederland
Details about the offer
- Listing ID:
- A689-9652
- Update:
- 28.12.2024
Description
2x Pfeiffer Classic 590 available!
Price: EUR 99.500/piece.
Configuration Coater 1:
2x Pfeiffer TPH 2301 (2300ls) completely overhauled
Pfeiffer DCU 600
2x VAT Throttle Valve 64048-pe48-ads2/0001
1x Pfeiffer PKR251 fullrange sensor
Pfeiffer TPR280 for prevacuum
Pfeiffer DUO 120 prepump (120m3/h)
Vacuumchamber:
for substrate size round 840mm
incl shielding and spare shielding set
2x viewport
Several feedthroughs
Rotating feedthrough incl thermocouple
Infrared heater
Watermanifold plus valves
Vacuumvalves for venting-pumpdown etc
Notes: Currently used for Resistance Evaporation (no boats available)
Current PLC and E-cabinet is removed due to IP. However: if required our company Orange Thin Films can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc)
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Configuration Coater 2:
2x Pfeiffer TPH 2201 s p c (horizontal turbo 2200ls) completely overhauled
Pfeiffer DCU 600
2x VAT Throttle Valve 64048-pe48-ads2/0001
1x Pfeiffer PKR251 fullrange sensor
Pfeiffer TPR280 for prevacuum
Pfeiffer DUO 120 prepump (120m3/h)
Vacuumchamber:
for substrate size round 840mm
incl shielding and spare shielding set
2x viewport
Several feedthroughs
Rotating feedthrough incl thermocouple
Infrared heater
Watermanifold plus valves
Vacuumvalves for venting-pumpdown etc
Notes: Current used for Resistance Evaporation (no boats available)
Current PLC and E-cabinet is removed due to IP. However: if required our company Orange Thin Films can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc)
Seller
Registered since: 2019
Send inquiry
Telephone & Fax
Gelnhausen Pfeiffer VacuumOkta 2000
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